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Facility

  1. Plasma-Enhanced Chemical Vapor Deposition (PECVD)

  2. Atmospheric Pressure Chemical Vapor Deposition (APCVD)

  3. Low Pressure Chemical Vapor Deposition (LPCVD)

  4. E-gun Evaporation

  5. Desktop Maskless Lithography

  6. Optical microscope

  7. Atomic Force Microscope

  8. Raman/Photoluminescence Spectroscopy System

  9. Electrical Probe System and meter(Keithley 4200)

  10. Four Point Probe Sheet Resistance Meter​

  11. Hall effect meter

  12. Autolab Potentiostate

  13. Contact angle meter

  14. Freeze Dryer

  15. Centrifuge​​

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