top of page

Facility
-
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
-
Atmospheric Pressure Chemical Vapor Deposition (APCVD)
-
Low Pressure Chemical Vapor Deposition (LPCVD)
-
E-gun Evaporation
-
Desktop Maskless Lithography
-
Optical microscope
-
Atomic Force Microscope
-
Raman/Photoluminescence Spectroscopy System
-
Electrical Probe System and meter(Keithley 4200)
-
Four Point Probe Sheet Resistance Meter
-
Hall effect meter
-
Autolab Potentiostate
-
Contact angle meter
-
Freeze Dryer
-
Centrifuge
bottom of page